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MEMS IMU Under a Microscope

Invensense MPU6050 is an integrated gyroscope and accelerometer with 16-bit readings. It contains 2 dies, soldered face-to-face in multiple places

What makes this interesting is because since it’s two stacked dies, they had trouble taking a picture about a year ago

Unfortunately, there are 2 dies attached face-to-face, and we were unable to separate them without crushing them into pieces.

Invensense-MPU6050-HD[1]

But they finally managed to seperate the two dies.

mpu6050-HD[1]

See more pictures here.

Check out ZeptoBars, their website is full of similar microscopic images of integrated circuits.


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