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Microchip Fabrication Wafer Transfer Handler Robot Teardown

Chalk this up under one of those rare finds you’ll probably never actually acquire – let alone teardown! This is one of those things we all know exists – every wafer that gets handled gets primarily handled by robots like this – but to actually see the innards of one is pretty intriguing. Moving parts have to be designed to not shed even microscopic shavings, as any particle that landed on a wafer would destroy its production. Slide rails and tubes are precisely manufactured, and the motors that drive them sound superb! Check it out in the video teardown, below!

An out of the ordinary teardown of a Tel (Tokyo Electon Tohoku) wafer transfer handler robot used in microchip fabrication.

This little robot was found deep inside a large 2 x 2 x 3 meter tall wafer kiln-like machine.


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